반도체 제조 공정에 많이 사용되는 WET cleaner 설비

● Standard Wet Station - Easy to maintenance structure

● High throughput - Higher throughput than competitor’s

● Minimized footprint - up to max. 30% smaller than other Wet Stations

● Superior process performance - Watermark free & remarkable particle control

 

※ GUI( GEM )

※ SCHEDULER